JPH0198163U - - Google Patents
Info
- Publication number
- JPH0198163U JPH0198163U JP19248487U JP19248487U JPH0198163U JP H0198163 U JPH0198163 U JP H0198163U JP 19248487 U JP19248487 U JP 19248487U JP 19248487 U JP19248487 U JP 19248487U JP H0198163 U JPH0198163 U JP H0198163U
- Authority
- JP
- Japan
- Prior art keywords
- magnets
- target
- magnet
- grid
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19248487U JPH0198163U (en]) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19248487U JPH0198163U (en]) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198163U true JPH0198163U (en]) | 1989-06-30 |
Family
ID=31483341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19248487U Pending JPH0198163U (en]) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198163U (en]) |
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1987
- 1987-12-17 JP JP19248487U patent/JPH0198163U/ja active Pending